Neuere Beschaffungen, bei denen der Anbieter Picosun Europe GmbH erwähnt wird
2020-02-10ALS-System (Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe)
Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure below. A mold pattern, created within a substrate for example by dry etching, is filled with loose micron-sized particles. Then the substrate is subjected to an ALD process. With optimized process conditions the initially loose particles are glued (agglomerated) at the points of contact to a rigid porous 3D structure over the whole mold depth by an ALD …
Ansicht der Beschaffung » Erwähnte Lieferanten:Picosun Europe GmbH