Neuere Beschaffungen, bei denen der Anbieter Semsysco GmbH erwähnt wird
2017-11-29ECD Tool (Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe)
This document defines all Fraunhofer IZM-ASSID requirements and acceptance criteria for deposition equipment with different options (electro chemical deposition equipment (ECD) and e-less deposition) which must be achieved during start-up and warranty period. These criteria are designed to demonstrate the capability of the processing equipment to fulfil the requirements for metal plating of high aspect ratio bumps, Redistribution Layers, copper filling of high aspect ratio trough silicon via (TSV) and …
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