Neuere Beschaffungen, bei denen der Anbieter Tokyo Electron Europe Ltd erwähnt wird
2019-09-27Resisttrack DUV (Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe)
As a part of the stratgetic investment project „FMD“, a wafer track for DUV lithography is to be procured. Thereby the lithography at IPMS is significantly improved in terms of the resolution down to 110nm structure size and this also meets the increased technological requirements in the project areas of IPMS for 200mm wafer. The tool should consist of 2 coating modules, 2 developer modules, 9 hotplates (incl. 1 HMDS- hotplates), 5 cool plates for 200mm, a climate controlling system for coating module …
Ansicht der Beschaffung » Erwähnte Lieferanten:Tokyo Electron Europe Ltd