Sputter deposition system for VHL EMIL lab
At HZB a new lab is under development called the ‘Energy Materials In-situ Lab’, EMIL. It is located in a new building that is attached to the building of the synchrotron BESSY II in Berlin. The new building contains multiple lab, 1 of those is the SISSY (Silicon In-situ Spectroscopy at the Synchrotron) lab. The SISSY lab will be housing 2 X-ray beamlines originating at BESSY II connected to an ultra-high vacuum (UHV) chamber equipped with complex X-ray analytics. This analytics chamber in turn is connected to a complex UHV transfer system that allows transfer of samples from several thin film deposition tools to the analytics and from several load locks to the deposition tools. 1 of the deposition tools will be a sputter deposition tool and this is the specification for that tool called PVDII from now on.
The UHV transfer system has been installed and the sputter tool will need to be compatible with the existing transfer system in terms of space and sample transfer mechanism.
Deadline
Die Frist für den Eingang der Angebote war 2015-12-21.
Die Ausschreibung wurde veröffentlicht am 2015-11-10.
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Geschichte der Beschaffung
| Datum |
Dokument |
| 2015-11-10
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Auftragsbekanntmachung
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