Kurze Beschreibung
This document defines all Fraunhofer IZM requirements and acceptance criteria for a spray coater system, which must be achieved during start-up and warranty period. These criteria are designed to demonstrate the capability of the processing equipment to fulfil the requirements for spray coating thin film polymers and photo-resists on full format Panels (610 mm x 460 mm) and wafers as an option (if possible). The spray coater should include only one chuck and does not need an automated handling system.