Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfill the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A Wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
Deadline
Die Frist für den Eingang der Angebote war 2018-04-03.
Die Ausschreibung wurde veröffentlicht am 2018-03-05.
Anbieter
Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:
Bekanntmachung über vergebene Aufträge (2018-09-26) Öffentlicher Auftraggeber Name und Adressen
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastr. 27 c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: fraunhofer@deutsche-evergabe.de📧
Region: München, Kreisfreie Stadt🏙️
URL: http://www.fraunhofer.de🌏
Adresse des Käuferprofils: http://www.deutsche-evergabe.de/🌏 Art des öffentlichen Auftraggebers
Andere Art: Forschungsgesellschaft e. V.
Objekt Umfang der Beschaffung
Titel: Scanning Acoustic Microscope
E_038_234642 ChrPat-bla FMD
Produkte/Dienstleistungen: Akustische Mikroskope📦
Kurze Beschreibung:
“Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from...”
Kurze Beschreibung
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
1️⃣
Ort der Leistung: Duisburg, Kreisfreie Stadt🏙️
Hauptstandort oder Erfüllungsort: 47057 Duisburg
Beschreibung der Beschaffung:
“Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from...”
Beschreibung der Beschaffung
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top Wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes. The system has to be installed by the vendor as a “stand-alone-tool” or “through the wall” in the clean-room at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (dass 10}. Fraunhofer IMS prepares the clean-room for the system installation. For proven reliability the vendor has to have installed similar systems in more than 25 units worldwide. The system has to allow a completely safe process run without any risk for the health of the operator. Because of limited cleanroom space the tool should have a footprint smaller than 2 m x 1,5 m. External cabinets are not included in this limitation.
Mehr anzeigen Vergabekriterien
Kostenkriterium (Name): Price
Kostenkriterium (Gewichtung): 35 %
Kostenkriterium (Name): Service
Kostenkriterium (Gewichtung): 15 %
Kostenkriterium (Name): Delivery time
Kostenkriterium (Gewichtung): 10 %
Kostenkriterium (Name): Technical specification
Kostenkriterium (Gewichtung): 40 %
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen: See specification.
Beschreibung
Zusätzliche Informationen: The procedure is repealed according to § 63 (1) 1 VGV.
Verfahren Art des Verfahrens
Wettbewerbliches Verfahren mit Verhandlung
Administrative Informationen
Frühere Veröffentlichungen zu diesem Verfahren: 2018/S 046-100472
Auftragsvergabe
1️⃣
Titel: Scanning Acoustic Microscope
Informationen über nicht gewährte Zuschüsse
Es sind keine Angebote oder Teilnahmeanträge eingegangen oder alle wurden abgelehnt
“— Request of documents — available at: The award documents can be retrieved.
Exclusively through the award portal of the German e-Vergabe at...”
— Request of documents — available at: The award documents can be retrieved.
Exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act against restraints of competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Für Mediationsverfahren zuständige Stelle
Name: Vergabeprüfstelle des BMBF Referat Z 23
Postanschrift: Heinemannstraße 2
Postort: Bonn
Postleitzahl: 53175
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB “German Act Against Restraints of Competition”). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer “procurement review authority” has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2018/S 188-424499 (2018-09-26)
Bekanntmachung über vergebene Aufträge (2019-04-09) Objekt Umfang der Beschaffung
Kurze Beschreibung:
“Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from...”
Kurze Beschreibung
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least 1 cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
Mehr anzeigen
Gesamtwert der Beschaffung (ohne MwSt.): EUR 0.01 💰
Beschreibung
Hauptstandort oder Erfüllungsort: 47057 Duisburg.
Beschreibung der Beschaffung:
“Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from...”
Beschreibung der Beschaffung
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least 1 cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function.
Detailed specifications for these functions are given in section 2.1).
Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes.
The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included.
The tool must include software to allow, manual measurements as well as generation and
execution of measurement recipes.
The system has to be installed by the vendor as a "stand-alone-tool" or "through the wall" in the clean-room at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (dass 10). Fraunhofer IMS prepares the clean-room for the system installation.
For proven reliability the vendor has to have installed similar systems in more than 25 units worldwide.
The system has to allow a completely safe process run without any risk for the health of the operator.
Because of limited cleanroom space the tool should have a footprint smaller than 2 m x 1,5 m. External cabinets are not included in this limitation.
Mehr anzeigen Vergabekriterien
Qualitätskriterium (Bezeichnung): Service
Qualitätskriterium (Gewichtung): 15
Qualitätskriterium (Bezeichnung): Delivery time
Qualitätskriterium (Gewichtung): 10
Qualitätskriterium (Bezeichnung): Technical specification
Qualitätskriterium (Gewichtung): 40
Preis (Gewichtung): 35
Auftragsvergabe
Datum des Vertragsabschlusses: 2019-03-29 📅
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 1
Name und Anschrift des Auftragnehmers
Name: Sonix TM
Postanschrift: 8700 Morrissette Dr.
Postort: Springfield
Postleitzahl: VA 22152
Land: Vereinigte Staaten 🇺🇸
Region: 00 🏙️
Der Auftragnehmer ist ein KMU
Angaben zum Wert des Auftrags/der Partie (ohne MwSt.)
Gesamtwert des Auftrags/Loses: EUR 0.01 💰
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB ). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to 10 calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Mehr anzeigen
Quelle: OJS 2019/S 073-172413 (2019-04-09)