Scanning Acoustic Microscope

Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe

Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfill the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A Wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.

Deadline

Die Frist für den Eingang der Angebote war 2018-04-03. Die Ausschreibung wurde veröffentlicht am 2018-03-05.

Anbieter

Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:

Wer? Wie? Wo?
Geschichte der Beschaffung
Datum Dokument
2018-03-05 Auftragsbekanntmachung
2018-09-26 Bekanntmachung über vergebene Aufträge
2019-04-09 Bekanntmachung über vergebene Aufträge
Auftragsbekanntmachung (2018-03-05)
Objekt
Umfang der Beschaffung
Titel: Akustische Mikroskope
Referenznummer: E_038_234642 ChrPat-bla FMD
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfill the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A Wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
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Metadaten der Bekanntmachung
Originalsprache: Englisch 🗣️
Dokumenttyp: Auftragsbekanntmachung
Art des Auftrags: Lieferungen
Verordnung: Europäische Union, mit GPA-Beteiligung
Gemeinsames Vokabular für öffentliche Aufträge (CPV)
Code: Akustische Mikroskope 📦
Ort der Leistung
NUTS-Region: Duisburg, Kreisfreie Stadt 🏙️

Verfahren
Verfahrensart: Verhandlungsverfahren
Angebotsart: Angebot für alle Lose
Vergabekriterien
Wirtschaftlichstes Angebot

Öffentlicher Auftraggeber
Identität
Land: Deutschland 🇩🇪
Art des öffentlichen Auftraggebers: Sonstiges
Name des öffentlichen Auftraggebers: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastr. 27 c
Postleitzahl: 80686
Postort: München
Kontakt
Internetadresse: http://www.fraunhofer.de 🌏
E-Mail: fraunhofer@deutsche-evergabe.de 📧
URL der Dokumente: http://www.deutsche-evergabe.de/ 🌏
URL der Teilnahme: http://www.deutsche-evergabe.de/ 🌏

Referenz
Daten
Absendedatum: 2018-03-05 📅
Einreichungsfrist: 2018-04-03 📅
Veröffentlichungsdatum: 2018-03-07 📅
Kennungen
Bekanntmachungsnummer: 2018/S 046-100472
ABl. S-Ausgabe: 46
Zusätzliche Informationen
— Request of documents — available at: The award documents can be retrieved. Exclusively through the award portal of the German e-Vergabe at. www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§ 134 GWB "German Act Against Restraints of Competition"). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named underNo. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
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Objekt
Umfang der Beschaffung
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function.
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Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
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The system has to be installed by the vendor as a "stand-alone-tool" or "through the wall" in the clean-room at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (dass 10}. Fraunhofer IMS prepares the clean-room for the system installation.
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For proven reliability the vendor has to have installed similar systems in more than 25 units worldwide.
The system has to allow a completely safe process run without any risk for the health of the operator.
Because of limited cleanroom space the tool should have a footprint smaller than 2 m x 1,5 m. External cabinets are not included in this limitation.
Dauer: 10 Monate
Beschreibung der Optionen: See spezification.
Ort der Leistung
Hauptstandort oder Erfüllungsort: 47057 Duisburg

Rechtliche, wirtschaftliche, finanzielle und technische Informationen
Bedingungen für die Teilnahme
Wirtschaftliche und finanzielle Leistungsfähigkeit:
(1) Company profile and the actual amount of employees.
(2) Designation of the company revenue for the last 3 business years
(3) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB)
(4) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client)
Technische und berufliche Fähigkeiten:
(1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last three years.
Auftragsausführung
Bedingungen für die Vertragserfüllung:
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
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Verfahren
Mindestzahl der Bewerber: 3
Höchstzahl der Bewerber: 5
Objektive Kriterien für die Auswahl der begrenzten Anzahl von Bewerbern: According Suitability documents, references, turn over.
Zeitpunkt des Eingangs der Angebote: 23:59
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Englisch 🗣️

Öffentlicher Auftraggeber
Identität
Andere Art des öffentlichen Auftraggebers: Forschungsgesellschaft e. V.
Kontakt
Adresse des Käuferprofils: http://www.deutsche-evergabe.de/ 🌏
Dokumente URL: http://www.deutsche-evergabe.de/ 🌏

Referenz
Zusätzliche Informationen
— Request of documents — available at: The award documents can be retrieved.
Exclusively through the award portal of the German e-Vergabe at.
www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§ 134 GWB "German Act Against Restraints of Competition"). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named underNo. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Mehr anzeigen
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Ergänzende Informationen
Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪
Informationen zu Fristen für Nachprüfungsverfahren:
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB "German Act Against Restraints of Competition"). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer "procurement review authority" has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
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Für Mediationsverfahren zuständige Stelle
Name: Vergabeprüfstelle des BMBF Referat Z 23
Postanschrift: Heinemannstraße 2
Postleitzahl: 53175
Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
E-Mail: einkauf@zv.fraunhofer.de 📧
Internetadresse: http://www.fraunhofer.de 🌏
Quelle: OJS 2018/S 046-100472 (2018-03-05)
Bekanntmachung über vergebene Aufträge (2018-09-26)
Objekt
Umfang der Beschaffung
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
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Metadaten der Bekanntmachung
Dokumenttyp: Bekanntmachung über vergebene Aufträge

Verfahren
Angebotsart: Entfällt

Referenz
Daten
Absendedatum: 2018-09-26 📅
Veröffentlichungsdatum: 2018-09-29 📅
Kennungen
Bekanntmachungsnummer: 2018/S 188-424499
Verweist auf Bekanntmachung: 2018/S 046-100472
ABl. S-Ausgabe: 188
Zusätzliche Informationen
The procedure is repealed according to § 63 (1) 1 VGV.

Objekt
Umfang der Beschaffung
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top Wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes. The system has to be installed by the vendor as a “stand-alone-tool” or “through the wall” in the clean-room at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (dass 10}. Fraunhofer IMS prepares the clean-room for the system installation. For proven reliability the vendor has to have installed similar systems in more than 25 units worldwide. The system has to allow a completely safe process run without any risk for the health of the operator. Because of limited cleanroom space the tool should have a footprint smaller than 2 m x 1,5 m. External cabinets are not included in this limitation.
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Beschreibung der Optionen: See specification.
Zusätzliche Informationen: The procedure is repealed according to § 63 (1) 1 VGV.

Verfahren
Vergabekriterien
Kostenkriterium (Name): Price
Kostenkriterium (Gewichtung): 35 %
Kostenkriterium (Name): Service
Kostenkriterium (Gewichtung): 15 %
Kostenkriterium (Name): Delivery time
Kostenkriterium (Gewichtung): 10 %
Kostenkriterium (Name): Technical specification
Kostenkriterium (Gewichtung): 40 %

Referenz
Zusätzliche Informationen
Exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act against restraints of competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Mehr anzeigen

Ergänzende Informationen
Körper überprüfen
Informationen zu Fristen für Nachprüfungsverfahren:
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB “German Act Against Restraints of Competition”). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer “procurement review authority” has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Mehr anzeigen
Quelle: OJS 2018/S 188-424499 (2018-09-26)
Bekanntmachung über vergebene Aufträge (2019-04-09)
Objekt
Umfang der Beschaffung
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least 1 cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes. The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included. The tool must include software to allow, manual measurements as well as generation and execution of measurement recipes.
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Gesamtwert des Auftrags: 0.01 EUR 💰

Referenz
Daten
Absendedatum: 2019-04-09 📅
Veröffentlichungsdatum: 2019-04-12 📅
Kennungen
Bekanntmachungsnummer: 2019/S 073-172413
ABl. S-Ausgabe: 73
Zusätzliche Informationen
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen

Objekt
Umfang der Beschaffung
Kurze Beschreibung:
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfil the following functions: fully automated wafer handling from at least 1 cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function.
Mehr anzeigen
Detailed specifications for these functions are given in section 2.1).
Results from the measurements must be saved as ASCII data automatically. Software for defect review must be included. Arbitrary numbers and types of measurements must be combinable in measurement recipes.
The wafers must be loaded automatically by a robot handler from a cassette. Wafer size is 200 mm. Measurement recipes for each wafer must be selectable individually. A wafer barcode reader for both, the top and the bottom wafer must be included.
The tool must include software to allow, manual measurements as well as generation and
execution of measurement recipes.
The system has to be installed by the vendor as a "stand-alone-tool" or "through the wall" in the clean-room at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (dass 10). Fraunhofer IMS prepares the clean-room for the system installation.
Mehr anzeigen
Ort der Leistung
Hauptstandort oder Erfüllungsort: 47057 Duisburg.

Verfahren
Vergabekriterien
Qualitätskriterium (Bezeichnung): Service
Qualitätskriterium (Gewichtung): 15
Qualitätskriterium (Bezeichnung): Delivery time
Qualitätskriterium (Gewichtung): 10
Qualitätskriterium (Bezeichnung): Technical specification
Qualitätskriterium (Gewichtung): 40
Preis (Gewichtung): 35

Auftragsvergabe
Datum des Vertragsabschlusses: 2019-03-29 📅
Name: Sonix TM
Postanschrift: 8700 Morrissette Dr.
Postort: Springfield
Postleitzahl: VA 22152
Land: Vereinigte Staaten 🇺🇸
00 🏙️
Gesamtwert des Auftrags: 0.01 EUR 💰
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 1

Referenz
Zusätzliche Informationen
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Mehr anzeigen

Ergänzende Informationen
Körper überprüfen
Informationen zu Fristen für Nachprüfungsverfahren:
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB <German Act Against Restraints of Competition>). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer <procurement review authority> has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to 10 calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
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Quelle: OJS 2019/S 073-172413 (2019-04-09)
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Region:
Deutschland Bayern Oberbayern München, Kreisfreie Stadt Nordrhein-Westfalen Düsseldorf Duisburg, Kreisfreie Stadt
Produkte/Dienstleistungen:
Laborgeräte, optische Geräte und... Apparate und Geräte zum Prüfen und Testen Mikroskope Akustische und Projektionsmikroskope Akustische Mikroskope