The planned acquisition comprises a cleanroom compatible ion beam etching system for patterning of magnetic multilayer stacks on standardised 200 mm semiconductor based wafers over resist masks or hard masks. Furthermore also Au layers or Pt/AlN stacks could be patterned by ion beam etching. In addition, it should provide the possibilities to process also 150 mm wafers. The tool requires an in situ measurement for detecting of etch progress and end point, preferred by SIMS.
Deadline
Die Frist für den Eingang der Angebote war 2019-03-11.
Die Ausschreibung wurde veröffentlicht am 2019-02-07.
Objekt Umfang der Beschaffung
Titel: 1 pc. Ion Beam Etch Tool
E_134_253632 deyda-golame FMD
Produkte/Dienstleistungen: Oberflächenbehandlung📦
Kurze Beschreibung:
“The planned acquisition comprises a cleanroom compatible ion beam etching system for patterning of magnetic multilayer stacks on standardised 200 mm...”
Kurze Beschreibung
The planned acquisition comprises a cleanroom compatible ion beam etching system for patterning of magnetic multilayer stacks on standardised 200 mm semiconductor based wafers over resist masks or hard masks. Furthermore also Au layers or Pt/AlN stacks could be patterned by ion beam etching. In addition, it should provide the possibilities to process also 150 mm wafers. The tool requires an in situ measurement for detecting of etch progress and end point, preferred by SIMS.
1️⃣
Ort der Leistung: Chemnitz, Kreisfreie Stadt🏙️
Hauptstandort oder Erfüllungsort: 09126 Chemnitz.
Beschreibung der Beschaffung:
“The planned acquisition comprises a cleanroom compatible ion beam etching system for patterning of magnetic multilayer stacks on standardised 200 mm...”
Beschreibung der Beschaffung
The planned acquisition comprises a cleanroom compatible ion beam etching system for patterning of magnetic multilayer stacks on standardised 200 mm semiconductor based wafers over resist masks or hard masks. Furthermore also Au layers or Pt/AlN stacks could be patterned by ion beam etching. In addition, it should provide the possibilities to process also 150 mm wafers. The tool requires an in situ measurement for detecting of etch progress and end point, preferred by SIMS.
Mehr anzeigen Vergabekriterien
Der Preis ist nicht das einzige Zuschlagskriterium, und alle Kriterien werden nur in den Auftragsunterlagen genannt
Laufzeit des Vertrags, der Rahmenvereinbarung oder des dynamischen Beschaffungssystems
Der nachstehende Zeitrahmen ist in Monaten ausgedrückt.
Beschreibung
Dauer: 12
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen:
“Option 1: quarz wafer (2.10/6.).
Option 2: list of available equipment and consumable parts.
Option 3: signal light tower.”
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Liste und kurze Beschreibung der Bedingungen:
“The documents listed in the following must be presented in full with the tender. Incomplete documents could lead to exclusion from the procedure.” Wirtschaftliche und finanzielle Leistungsfähigkeit
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Designation of the company revenue for the last 3 business years;
2) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and §...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Designation of the company revenue for the last 3 business years;
2) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB);
3) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).
Mehr anzeigen Technische und berufliche Fähigkeiten
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Company profile and the actual amount of employees;
2) References from comparable projects not more than 3 years old. If, for reasons of data protection,...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Company profile and the actual amount of employees;
2) References from comparable projects not more than 3 years old. If, for reasons of data protection, you are not allowed to name your contact persons, please categorize your client (research, industry, other public clients).
Mehr anzeigen Bedingungen für den Vertrag
Bedingungen für die Vertragserfüllung:
“In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents...”
Bedingungen für die Vertragserfüllung
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren Art des Verfahrens
Wettbewerbliches Verfahren mit Verhandlung
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2019-03-11
23:59 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders [§134 GWB (German Act Against Restraints of Competition)]. Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1). As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Für Mediationsverfahren zuständige Stelle
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postort: Bonn
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“Instruction on available legal remedies:
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the...”
Genaue Informationen über Fristen für Überprüfungsverfahren
Instruction on available legal remedies:
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB “German Act Against Restraints of Competition”). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer “procurement review authority” has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to 10 calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2019/S 030-066474 (2019-02-07)