The Fraunhofer IMS requires a new or refurbished stylus surface topography profiling system. With this Autoprofiler 8” (200 mm) wafers can be measured according to the specifications in the “Specification”.
The tool has to be capable for step height measurements on structures made of photoresist and deposited/etched structures like silicon, metals and oxides. The wafers have to be loaded automatically by a robot handler from cassettes. The measurement tool includes software, which allows manual measurements as well as execution of measurement recipes.
The system has to be installed by the manufacturer as a “stand-alone-tool” in the clean-room at the IMS site and must be conform to CMOS compatible clean-room conditions (class 10). Fraunhofer IMS prepares the clean-room for the system installation.
Deadline
Die Frist für den Eingang der Angebote war 2019-02-22.
Die Ausschreibung wurde veröffentlicht am 2019-01-22.
Objekt Umfang der Beschaffung
Titel: Automatic Surface Topography Profiling Tool
E_038_235946 ChrPat-KauAnj FMD
Produkte/Dienstleistungen: Diverse Maschinen und Geräte für besondere Zwecke📦
Kurze Beschreibung:
“The Fraunhofer IMS requires a new or refurbished stylus surface topography profiling system. With this Autoprofiler 8” (200 mm) wafers can be measured...”
Kurze Beschreibung
The Fraunhofer IMS requires a new or refurbished stylus surface topography profiling system. With this Autoprofiler 8” (200 mm) wafers can be measured according to the specifications in the “Specification”.
The tool has to be capable for step height measurements on structures made of photoresist and deposited/etched structures like silicon, metals and oxides. The wafers have to be loaded automatically by a robot handler from cassettes. The measurement tool includes software, which allows manual measurements as well as execution of measurement recipes.
The system has to be installed by the manufacturer as a “stand-alone-tool” in the clean-room at the IMS site and must be conform to CMOS compatible clean-room conditions (class 10). Fraunhofer IMS prepares the clean-room for the system installation.
1️⃣
Ort der Leistung: Duisburg, Kreisfreie Stadt🏙️
Hauptstandort oder Erfüllungsort: 47057 Duisburg.
Beschreibung der Beschaffung:
“The Fraunhofer IMS requires a new or refurbished stylus surface topography profiling system. With this Autoprofiler 8” (200 mm) wafers can be measured...”
Beschreibung der Beschaffung
The Fraunhofer IMS requires a new or refurbished stylus surface topography profiling system. With this Autoprofiler 8” (200 mm) wafers can be measured according to the specifications in the “Specification”.
The tool has to be capable for step height measurements on structures made of photoresist and deposited/etched structures like silicon, metals and oxides. The wafers have to be loaded automatically by a robot handler from cassettes. The measurement tool includes software, which allows manual measurements as well as execution of measurement recipes.
The system has to be installed by the manufacturer as a “stand-alone-tool” in the clean-room at the IMS site and must be conform to CMOS compatible clean-room conditions (class 10). Fraunhofer IMS prepares the clean-room for the system installation.
Mehr anzeigen Vergabekriterien
Der Preis ist nicht das einzige Zuschlagskriterium, und alle Kriterien werden nur in den Auftragsunterlagen genannt
Laufzeit des Vertrags, der Rahmenvereinbarung oder des dynamischen Beschaffungssystems
Der nachstehende Zeitrahmen ist in Monaten ausgedrückt.
Beschreibung
Dauer: 9
Informationen über die Begrenzung der Zahl der einzuladenden Bewerber
Vorgesehene Mindestanzahl: 3
Maximale Anzahl: 5
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen: Bonded wafers, handling of glass wafers, Secs/Gem, maintenance contract.
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Liste und kurze Beschreibung der Bedingungen:
“The documents listed below must be presented in full with the offer. Incomplete documents may lead to the exclusion of the proceedings.” Wirtschaftliche und finanzielle Leistungsfähigkeit
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Company profile and the actual amount of employees.
2) Designation of the company revenue for the last 3 business years
3) Self-declaration regarding the...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Company profile and the actual amount of employees.
2) Designation of the company revenue for the last 3 business years
3) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB).
4) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).
Mehr anzeigen Technische und berufliche Fähigkeiten
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last 3 years.
2) For proven...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last 3 years.
2) For proven reliability, the system must be installed more than 20 units worldwide.
Mehr anzeigen Bedingungen für den Vertrag
Bedingungen für die Vertragserfüllung:
“In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents...”
Bedingungen für die Vertragserfüllung
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren Art des Verfahrens
Wettbewerbliches Verfahren mit Verhandlung
Informationen über die Reduzierung der Anzahl von Lösungen oder Angeboten während der Verhandlungen oder des Dialogs
Rückgriff auf ein gestaffeltes Verfahren, um die Zahl der zu erörternden Lösungen oder zu verhandelnden Angebote schrittweise zu verringern
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2019-02-22
23:59 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de
With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Für Mediationsverfahren zuständige Stelle
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postort: Bonn
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No. 4 GWB ). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2019/S 017-035490 (2019-01-22)