Single-Wafer Nassätzanlage

Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe

Fraunhofer IMS requires a new or refurbished fully automated spin-etching-tool. In this system, 8” (200 mm) wafers can be processed according to the specifications below.
The system has to include the following modules:
— an automation module for wafer handling,
— a silicon wet-etching-chamber with an appropriable spin etch process (see specification document),
— a spin-rinse-dry-chamber,
— a measurement station for determination of wafer thickness or silicon film thickness pre and post etching (see specification document),
— application software which offers the option of configuration of operating, engineering and maintenance mode.

Deadline

Die Frist für den Eingang der Angebote war 2019-10-04. Die Ausschreibung wurde veröffentlicht am 2019-09-04.

Anbieter

Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:

• Veeco GmbH

Wer?

• Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe

Wie?

• Maschinen für allgemeine und besondere Zwecke › Diverse Maschinen und Geräte für besondere Zwecke

Wo?

• Düsseldorf › Duisburg, Kreisfreie Stadt
• Oberbayern › München, Kreisfreie Stadt

Geschichte der Beschaffung

Datum	Dokument
2019-09-04	Auftragsbekanntmachung
2020-04-03	Bekanntmachung über vergebene Aufträge

Auftragsbekanntmachung (2019-09-04)
Objekt
Umfang der Beschaffung
Titel: Diverse Maschinen und Geräte für besondere Zwecke
Referenznummer: E_038_237240 ChrPat-golame
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated spin-etching-tool. In this system, 8” (200 mm) wafers can be processed according to the specifications below. The system has to include the following modules: — an automation module for wafer handling, — a silicon wet-etching-chamber with an appropriable spin etch process (see specification document), — a spin-rinse-dry-chamber, — a measurement station for determination of wafer thickness or silicon film thickness pre and post etching (see specification document), — application software which offers the option of configuration of operating, engineering and maintenance mode.

Metadaten der Bekanntmachung
Originalsprache: Englisch 🗣️
Dokumenttyp: Auftragsbekanntmachung
Art des Auftrags: Lieferungen
Verordnung: Europäische Union, mit GPA-Beteiligung
Gemeinsames Vokabular für öffentliche Aufträge (CPV)
Code: Diverse Maschinen und Geräte für besondere Zwecke 📦
Ort der Leistung
NUTS-Region: Duisburg, Kreisfreie Stadt 🏙️

Verfahren
Verfahrensart: Verhandlungsverfahren
Angebotsart: Angebot für alle Lose
Vergabekriterien
Wirtschaftlichstes Angebot

Öffentlicher Auftraggeber
Identität
Land: Deutschland 🇩🇪
Art des öffentlichen Auftraggebers: Sonstiges
Name des öffentlichen Auftraggebers: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe
Postanschrift: Hansastr. 27c
Postleitzahl: 80686
Postort: München
Kontakt
Internetadresse: http://www.fraunhofer.de 🌏
E-Mail: fraunhofer@deutsche-evergabe.de 📧
URL der Dokumente: http://www.deutsche-evergabe.de 🌏
URL der Teilnahme: http://www.deutsche-evergabe.de 🌏

Referenz
Daten
Absendedatum: 2019-09-04 📅
Einreichungsfrist: 2019-10-04 📅
Veröffentlichungsdatum: 2019-09-09 📅
Kennungen
Bekanntmachungsnummer: 2019/S 173-421527
ABl. S-Ausgabe: 173
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Objekt
Umfang der Beschaffung
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated spin-etching-tool. In this system, 8” (200 mm) wafers can be processed according to the specifications below.

The system has to include the following modules:

— an automation module for wafer handling,

— a silicon wet-etching-chamber with an appropriable spin etch process (see specification document),

— a spin-rinse-dry-chamber,

— a measurement station for determination of wafer thickness or silicon film thickness pre and post etching (see specification document),

— application software which offers the option of configuration of operating, engineering and maintenance mode.

Dauer: 6 Monate
Beschreibung der Optionen: 24 month warranty, maintenance contract, triple wafer stacks.
Ort der Leistung
Hauptstandort oder Erfüllungsort: 47057 Duisburg.

Rechtliche, wirtschaftliche, finanzielle und technische Informationen
Bedingungen für die Teilnahme
Befähigung zur Berufsausübung:

The documents listed below must be presented in full with the offer. Incomplete documents may lead to the exclusion of the proceedings.

Wirtschaftliche und finanzielle Leistungsfähigkeit:

1) Company profile and the actual amount of employees;

2) Designation of the company revenue for the last 3 business years;

3) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB);

4) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).

Technische und berufliche Fähigkeiten:

1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last 3 years.

Auftragsausführung
Bedingungen für die Vertragserfüllung:

In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.

Verfahren
Rechtsgrundlage: 32014L0024
Mindestzahl der Bewerber: 3
Höchstzahl der Bewerber: 5
Objektive Kriterien für die Auswahl der begrenzten Anzahl von Bewerbern: According eligibility criteria, references.
Zeitpunkt des Eingangs der Angebote: 23:59
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Englisch 🗣️

Öffentlicher Auftraggeber
Identität
Andere Art des öffentlichen Auftraggebers: Forschungsgesellschaft e. V.
Kontakt
Adresse des Käuferprofils: http://www.deutsche-evergabe.de 🌏
Dokumente URL: http://www.deutsche-evergabe.de 🌏

Referenz
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de

With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.

Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.

Please note that registration is required for requests to participate, tender submissions and tenderer questions.

We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Ergänzende Informationen
Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪
Informationen zu Fristen für Nachprüfungsverfahren:

A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No 4 GWB <German Act Against Restraints of Competition>). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer <procurement review authority> has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).

Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
E-Mail: einkauf@zv.fraunhofer.de 📧
Internetadresse: http://www.fraunhofer.de 🌏
Quelle: OJS 2019/S 173-421527 (2019-09-04)

Bekanntmachung über vergebene Aufträge (2020-04-03)
Objekt
Umfang der Beschaffung
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated Spin-Etching-Tool. In this system, 8” (200 mm) wafers can be processed according to the specifications below. The system has to include the following modules: • an automation module for wafer handling, • a silicon Wet-Etching-Chamber with an appropriable spin etch process (see specification document), • a Spin-Rinse-Dry-Chamber, • a measurement station for determination of wafer thickness or silicon film thickness pre and post etching (see specification document), • application software which offers the option of configuration of operating, engineering and maintenance mode.

Gesamtwert des Auftrags: 0.01 EUR 💰
Metadaten der Bekanntmachung
Dokumenttyp: Bekanntmachung über vergebene Aufträge

Verfahren
Angebotsart: Entfällt
Vergabekriterien
Niedrigster Preis

Referenz
Daten
Absendedatum: 2020-04-03 📅
Veröffentlichungsdatum: 2020-04-06 📅
Kennungen
Bekanntmachungsnummer: 2020/S 068-161529
Verweist auf Bekanntmachung: 2019/S 173-421527
ABl. S-Ausgabe: 68
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved Exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No I.1). As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Objekt
Umfang der Beschaffung
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated Spin-Etching-Tool. In this system, 8” (200 mm) wafers can be processed according to the specifications below.

• an automation module for wafer handling,

• a silicon Wet-Etching-Chamber with an appropriable spin etch process (see specification document),

• a Spin-Rinse-Dry-Chamber,

• a measurement station for determination of wafer thickness or silicon film thickness pre and post etching (see specification document),

• application software which offers the option of configuration of operating, engineering and maintenance mode.

Auftragsvergabe
Datum des Vertragsabschlusses: 2020-02-26 📅
Name: Veeco GmbH
Postort: Aschheim
Land: Deutschland 🇩🇪
München, Landkreis 🏙️
Gesamtwert des Auftrags: 0.01 EUR 💰
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 1

Öffentlicher Auftraggeber
Identität
Andere Art des öffentlichen Auftraggebers: Research association

Referenz
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved

Exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de

With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No I.1). As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.

Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.

Ergänzende Informationen
Körper überprüfen
Informationen zu Fristen für Nachprüfungsverfahren:

A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No 4 GWB ‘German Act Against Restraints of Competition’). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer ‘procurement review authority’ has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).

Quelle: OJS 2020/S 068-161529 (2020-04-03)

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