To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market. To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Deadline
Die Frist für den Eingang der Angebote war 2020-08-12.
Die Ausschreibung wurde veröffentlicht am 2020-07-10.
Auftragsbekanntmachung (2020-07-10) Objekt Umfang der Beschaffung
Titel: Diverse Maschinen und Geräte für besondere Zwecke
Referenznummer: E_827_205193 migl-KauAnj
Kurze Beschreibung:
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Metadaten der Bekanntmachung
Originalsprache: Englisch 🗣️
Dokumenttyp: Auftragsbekanntmachung
Art des Auftrags: Lieferungen
Verordnung: Europäische Union, mit GPA-Beteiligung
Gemeinsames Vokabular für öffentliche Aufträge (CPV)
Code: Diverse Maschinen und Geräte für besondere Zwecke📦 Ort der Leistung
NUTS-Region: München, Kreisfreie Stadt🏙️
Verfahren
Verfahrensart: Offenes Verfahren
Angebotsart: Angebot für alle Lose
Vergabekriterien
Wirtschaftlichstes Angebot
Öffentlicher Auftraggeber Identität
Land: Deutschland 🇩🇪
Art des öffentlichen Auftraggebers: Sonstiges
Name des öffentlichen Auftraggebers: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe
Postanschrift: Hansastr. 27c
Postleitzahl: 80686
Postort: München
Kontakt
Internetadresse: http://www.fraunhofer.de🌏
E-Mail: fraunhofer@deutsche-evergabe.de📧
URL der Dokumente: http://www.deutsche-evergabe.de🌏
URL der Teilnahme: http://www.deutsche-evergabe.de🌏
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Objekt Umfang der Beschaffung
Kurze Beschreibung:
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Dauer: 8 Monate
Beschreibung der Optionen: Please refer to point eight of the procurement description.
Ort der Leistung
Hauptstandort oder Erfüllungsort: 80686 München.
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Befähigung zur Berufsausübung:
The documents listed in the following must be presented in full with the tender. Incomplete documents could lead to exclusion from the procedure.
Wirtschaftliche und finanzielle Leistungsfähigkeit:
1) Designation of the company revenue for the last three business years.
2) Self-declaration regarding the absence of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB).
Technische und berufliche Fähigkeiten:
1) Company profile.
2) At least three references of realisations of special customer requirements that were different from standard devices (minimum information: name of the clients and contacts including contact data). If, for reasons of data protection, you are not allowed to name your contact persons, please categorise your client (research, industry, other public clients).
2) At least three references of realisations of special customer requirements that were different from standard devices (minimum information: name of the clients and contacts including contact data). If, for reasons of data protection, you are not allowed to name your contact persons, please categorise your client (research, industry, other public clients).
Auftragsausführung
Bedingungen für die Vertragserfüllung:
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren
Rechtsgrundlage: 32014L0024
Zeitpunkt des Eingangs der Angebote: 11:30
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
Gültigkeitsdauer des Angebots: 2020-10-12 📅
Datum der Angebotseröffnung: 2020-08-12 📅
Zeitpunkt der Angebotseröffnung: 12:00
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Ergänzende Informationen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪
Informationen zu Fristen für Nachprüfungsverfahren:
(GWB [German Act Against Restraints of Competition]). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer (procurement review authority) has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Informationen zu Fristen für Nachprüfungsverfahren
(GWB [German Act Against Restraints of Competition]). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer (procurement review authority) has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
E-Mail: einkauf@zv.fraunhofer.de📧
Internetadresse: http://www.fraunhofer.de🌏
Quelle: OJS 2020/S 134-329013 (2020-07-10)
Bekanntmachung über vergebene Aufträge (2020-08-12) Objekt Umfang der Beschaffung
Kurze Beschreibung:
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists performed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists performed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Metadaten der Bekanntmachung
Dokumenttyp: Bekanntmachung über vergebene Aufträge
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders arealso subject to the provisions regardingun successful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information;you otherwise bear the risk of possible tender exclusion.
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders arealso subject to the provisions regardingun successful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information;you otherwise bear the risk of possible tender exclusion.
Objekt Umfang der Beschaffung
Kurze Beschreibung:
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists performed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists performed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
Beschreibung der Optionen: Please refer to point 8 of the procurement description.
Verfahren Vergabekriterien
Qualitätskriterium (Bezeichnung): Technical performance according to description position
Qualitätskriterium (Gewichtung): 60
Preis (Gewichtung): 40
Referenz Zusätzliche Informationen
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders arealso subject to the provisions regardingun successful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders arealso subject to the provisions regardingun successful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
We therefore recommend early registration, also in order to receive any tenderer information;you otherwise bear the risk of possible tender exclusion.
Ergänzende Informationen Körper überprüfen
Informationen zu Fristen für Nachprüfungsverfahren:
GWB <German Act Against Restraints of Competition>). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer <procurement review authority> has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Informationen zu Fristen für Nachprüfungsverfahren
GWB ). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).