To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Deadline
Die Frist für den Eingang der Angebote war 2020-08-12.
Die Ausschreibung wurde veröffentlicht am 2020-07-10.
Auftragsbekanntmachung (2020-07-10) Objekt Umfang der Beschaffung
Titel: Diverse Maschinen und Geräte für besondere Zwecke
Referenznummer: E_827_205193 migl-KauAnj
Kurze Beschreibung:
“To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo...”
Kurze Beschreibung
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
Mehr anzeigen Metadaten der Bekanntmachung
Originalsprache: Englisch 🗣️
Dokumenttyp: Auftragsbekanntmachung
Art des Auftrags: Lieferungen
Verordnung: Europäische Union, mit GPA-Beteiligung
Gemeinsames Vokabular für öffentliche Aufträge (CPV)
Code: Diverse Maschinen und Geräte für besondere Zwecke📦 Ort der Leistung
NUTS-Region: München, Kreisfreie Stadt🏙️
Verfahren
Verfahrensart: Offenes Verfahren
Angebotsart: Angebot für alle Lose
Vergabekriterien
Wirtschaftlichstes Angebot
Öffentlicher Auftraggeber Identität
Land: Deutschland 🇩🇪
Art des öffentlichen Auftraggebers: Sonstiges
Name des öffentlichen Auftraggebers: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe
Postanschrift: Hansastr. 27c
Postleitzahl: 80686
Postort: München
Kontakt
Internetadresse: http://www.fraunhofer.de🌏
E-Mail: fraunhofer@deutsche-evergabe.de📧
URL der Dokumente: http://www.deutsche-evergabe.de🌏
URL der Teilnahme: http://www.deutsche-evergabe.de🌏
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
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Quelle: OJS 2020/S 134-329013 (2020-07-10)
Bekanntmachung über vergebene Aufträge (2020-08-12) Objekt Umfang der Beschaffung
Kurze Beschreibung:
“To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo...”
Kurze Beschreibung
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists performed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
Mehr anzeigen Metadaten der Bekanntmachung
Dokumenttyp: Bekanntmachung über vergebene Aufträge
“Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders arealso subject to the provisions regardingun successful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Mehr anzeigen
Quelle: OJS 2020/S 158-385520 (2020-08-12)