Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure below. A mold pattern, created within a substrate for example by dry etching, is filled with loose micron-sized particles. Then the substrate is subjected to an ALD process. With optimized process conditions the initially loose particles are glued (agglomerated) at the points of contact to a rigid porous 3D structure over the whole mold depth by an ALD layer with a thickness of several tens of nanometers. The feasibility of the novel technology has already been proven for different applications using particles from various materials. The new ALD tool should enable the next steps towards industrialization.
Deadline
Die Frist für den Eingang der Angebote war 2020-03-11.
Die Ausschreibung wurde veröffentlicht am 2020-02-10.
Anbieter
Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:
Objekt Umfang der Beschaffung
Titel: ALS-System
E_039_224398 ChrPat-bla
Produkte/Dienstleistungen: Diverse Maschinen und Geräte für besondere Zwecke📦
Kurze Beschreibung:
“Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure...”
Kurze Beschreibung
Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure below. A mold pattern, created within a substrate for example by dry etching, is filled with loose micron-sized particles. Then the substrate is subjected to an ALD process. With optimized process conditions the initially loose particles are glued (agglomerated) at the points of contact to a rigid porous 3D structure over the whole mold depth by an ALD layer with a thickness of several tens of nanometers. The feasibility of the novel technology has already been proven for different applications using particles from various materials. The new ALD tool should enable the next steps towards industrialization.
1️⃣
Ort der Leistung: Steinburg🏙️
Hauptstandort oder Erfüllungsort: 25524 Itzehoe.
Beschreibung der Beschaffung:
“Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure...”
Beschreibung der Beschaffung
Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure below. A mold pattern, created within a substrate for example by dry etching, is filled with loose micron-sized particles. Then the substrate is subjected to an ALD process. With optimized process conditions the initially loose particles are glued (agglomerated) at the points of contact to a rigid porous 3D structure over the whole mold depth by an ALD layer with a thickness of several tens of nanometers. The feasibility of the novel technology has already been proven for different applications using particles from various materials. The new ALD tool should enable the next steps towards industrialization.
Mehr anzeigen Vergabekriterien
Der Preis ist nicht das einzige Zuschlagskriterium, und alle Kriterien werden nur in den Auftragsunterlagen genannt
Laufzeit des Vertrags, der Rahmenvereinbarung oder des dynamischen Beschaffungssystems
Der nachstehende Zeitrahmen ist in Monaten ausgedrückt.
Beschreibung
Dauer: 9
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen: Spare process chamber, spare containers.
Umfang der Beschaffung
Informationen über die Fonds der Europäischen Union: Efre
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Liste und kurze Beschreibung der Bedingungen:
“The documents listed below must be presented in full with the offer. Incomplete documents may lead to the exclusion of the proceedings.” Wirtschaftliche und finanzielle Leistungsfähigkeit
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Company profile and the actual amount of employees;
2) Designation of the company revenue for the last three business years;
3) Self-declaration...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Company profile and the actual amount of employees;
2) Designation of the company revenue for the last three business years;
3) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB);
4) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).
Mehr anzeigen Technische und berufliche Fähigkeiten
Liste und kurze Beschreibung der Auswahlkriterien:
“1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last 3 years;
2) Experience with...”
Liste und kurze Beschreibung der Auswahlkriterien
1) Complete references (including contact persons with contact data) from comparable projects, which were realized in the last 3 years;
2) Experience with ALD-equipment, as tendered, shall be demonstrated for the last 3 years;
3) Availability of European service which responds to enquiries within one working day and enables repairs to be carried out immediately after receipt of the order.
Mehr anzeigen Bedingungen für den Vertrag
Bedingungen für die Vertragserfüllung:
“In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents...”
Bedingungen für die Vertragserfüllung
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren Art des Verfahrens
Offenes Verfahren
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2020-03-11 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Das Angebot muss gültig sein bis: 2020-05-11 📅
Bedingungen für die Öffnung der Angebote: 2020-03-12
13:00 📅
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No 4 GWB ). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2020/S 031-071899 (2020-02-10)
Ergänzende Angaben (2020-05-05) Objekt Umfang der Beschaffung
Kurze Beschreibung:
“Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure...”
Kurze Beschreibung
Fraunhofer ISIT plans to purchase an atomic layer deposition (ALD) system for a novel MEMS technology. The basic procedure is illustrated in the figure below. A mold pattern, created within a substrate for example by dry etching, is filled with loose micron-sized particles. Then the substrate is subjected to an ALD process. With optimised process conditions the initially loose particles are glued (agglomerated) at the points of contact to a rigid porous 3D structure over the whole mold depth by an ALD layer with a thickness of several tens of nanometers. The feasibility of the novel technology has already been proven for different applications using particles from various materials. The new ALD tool should enable the next steps towards industrialisation.
Ergänzende Informationen Referenz der ursprünglichen Mitteilung
Nummer der Bekanntmachung im Amtsblatt S: 2020/S 031-071899
Änderungen Zu berichtigender Text in der ursprünglichen Bekanntmachung
Nummer des Abschnitts: IV.2.6)
Ort des zu ändernden Textes: Minimum time frame during which the tenderer must maintain the tender
Alter Wert
Datum: 2020-05-11 📅
Neuer Wert
Datum: 2020-06-17 📅
Quelle: OJS 2020/S 089-212343 (2020-05-05)
Bekanntmachung über vergebene Aufträge (2020-10-16) Öffentlicher Auftraggeber Art des öffentlichen Auftraggebers
Andere Art: Research company
Objekt Umfang der Beschaffung
Gesamtwert der Beschaffung (ohne MwSt.): EUR 0.01 💰
Vergabekriterien
Qualitätskriterium (Bezeichnung): Technical details
Qualitätskriterium (Gewichtung): 60
Preis (Gewichtung): 40
Verfahren Administrative Informationen
Frühere Veröffentlichungen zu diesem Verfahren: 2020/S 031-071899
Auftragsvergabe
1️⃣
Titel: ALS-System
Datum des Vertragsabschlusses: 2020-07-10 📅
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 4
Anzahl der auf elektronischem Wege eingegangenen Angebote: 4
Name und Anschrift des Auftragnehmers
Name: Picosun Europe GmbH
Postort: Dresden
Land: Deutschland 🇩🇪
Region: Dresden🏙️
Der Auftragnehmer ist ein KMU ✅ Angaben zum Wert des Auftrags/der Partie (ohne MwSt.)
Gesamtwert des Auftrags/Loses: EUR 0.01 💰
Quelle: OJS 2020/S 205-498586 (2020-10-16)