Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200 mm wafer substrates.
The system must include top side/backside/VIS and IR alignment, run-out compensation, I- and g- line UV LED light source, automatic wafer handling cassette-to-cassette — including thin wafer handling down to 350 μm, SECS-II/GEM interface.
Deadline
Die Frist für den Eingang der Angebote war 2020-05-15.
Die Ausschreibung wurde veröffentlicht am 2020-04-14.
Anbieter
Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:
Objekt Umfang der Beschaffung
Titel: Automatic Mask Aligner — E_827_205181 ChrPat-bla
E_827_205181 ChrPat-bla
Produkte/Dienstleistungen: Diverse Maschinen und Geräte für besondere Zwecke📦
Kurze Beschreibung:
“Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200 mm wafer substrates.
The system must include top side/backside/VIS and IR alignment,...”
Kurze Beschreibung
Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200 mm wafer substrates.
The system must include top side/backside/VIS and IR alignment, run-out compensation, I- and g- line UV LED light source, automatic wafer handling cassette-to-cassette — including thin wafer handling down to 350 μm, SECS-II/GEM interface.
1️⃣
Ort der Leistung: München, Kreisfreie Stadt🏙️
Hauptstandort oder Erfüllungsort: München.
Beschreibung der Beschaffung:
“Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200 mm wafer substrates.
The system must include top side/backside/VIS and IR alignment,...”
Beschreibung der Beschaffung
Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200 mm wafer substrates.
The system must include top side/backside/VIS and IR alignment, run-out compensation, I- and g- line UV LED light source, automatic wafer handling cassette-to-cassette — including thin wafer handling down to 350 μm, SECS-II/GEM interface.
Mehr anzeigen Vergabekriterien
Der Preis ist nicht das einzige Zuschlagskriterium, und alle Kriterien werden nur in den Auftragsunterlagen genannt
Laufzeit des Vertrags, der Rahmenvereinbarung oder des dynamischen Beschaffungssystems
Der nachstehende Zeitrahmen ist in Monaten ausgedrückt.
Beschreibung
Dauer: 7
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Liste und kurze Beschreibung der Bedingungen:
“The documents listed in the following must be presented in full with the tender. Incomplete documents will lead to exclusion from the procedure.” Wirtschaftliche und finanzielle Leistungsfähigkeit
Liste und kurze Beschreibung der Auswahlkriterien:
“1) company profile and the actual amount of employees;
2) designation of the company revenue for the last 3 business years;
3) self-declaration regarding...”
Liste und kurze Beschreibung der Auswahlkriterien
1) company profile and the actual amount of employees;
2) designation of the company revenue for the last 3 business years;
3) self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB);
4) excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).
Mehr anzeigen Technische und berufliche Fähigkeiten
Liste und kurze Beschreibung der Auswahlkriterien:
“1) complete references (including contact persons with contact data) from comparable projects, which were realised in the last 3 years;
2) European service...”
Liste und kurze Beschreibung der Auswahlkriterien
1) complete references (including contact persons with contact data) from comparable projects, which were realised in the last 3 years;
2) European service and sales office and German based support resources;
3) possible vendors should have delivered at least five tools with an automatic mask align system in Europe within the last 3 years.
Mehr anzeigen Bedingungen für den Vertrag
Bedingungen für die Vertragserfüllung:
“In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents...”
Bedingungen für die Vertragserfüllung
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren Art des Verfahrens
Offenes Verfahren
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2020-05-15
09:00 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
Das Angebot muss gültig sein bis: 2020-07-14 📅
Bedingungen für die Öffnung der Angebote: 2020-05-15
09:30 📅
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No I.1). As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No 4 GWB ‘German Act Against Restraints of Competition’). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer ‘procurement review authority’ has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party, the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2020/S 075-177852 (2020-04-14)
Bekanntmachung über vergebene Aufträge (2020-10-15) Öffentlicher Auftraggeber Art des öffentlichen Auftraggebers
Andere Art: research company e. V.
Objekt Umfang der Beschaffung
Kurze Beschreibung:
“Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200mm wafer substrates.
The system must include top side/backside/VIS and IR alignment,...”
Kurze Beschreibung
Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200mm wafer substrates.
The system must include top side/backside/VIS and IR alignment, run-out compensation, I- and g- line UV LED light source, automatic wafer handling cassette-to-cassette – including thin wafer handling down to 350 μm, SECS-II/GEM interface.
Mehr anzeigen
Gesamtwert der Beschaffung (ohne MwSt.): EUR 0.01 💰
Beschreibung
Hauptstandort oder Erfüllungsort: 80686 München.
Beschreibung der Beschaffung:
“Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200mm wafer substrates.
The system must include top side/backside/VIS and IR alignment,...”
Beschreibung der Beschaffung
Cassette-to-cassette fully automatic 7”/9” mask aligner for 150/200mm wafer substrates.
The system must include top side/backside/VIS and IR alignment, run-out compensation, I- and g- line UV LED light source, automatic wafer handling cassette-to-cassette – including thin wafer handling down to 350 μm, SECS-II/GEM interface.
Mehr anzeigen Vergabekriterien
Qualitätskriterium (Bezeichnung): Technical details run out compensation
Qualitätskriterium (Gewichtung): 55
Qualitätskriterium (Bezeichnung): Delivery time
Qualitätskriterium (Gewichtung): 10
Preis (Gewichtung): 35
Verfahren Administrative Informationen
Frühere Veröffentlichungen zu diesem Verfahren: 2020/S 075-177852
Auftragsvergabe
1️⃣
Titel: Automatic Mask Aligner — E_827_205181 ChrPat-bla
Datum des Vertragsabschlusses: 2020-08-17 📅
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 3
Anzahl der auf elektronischem Wege eingegangenen Angebote: 3
Name und Anschrift des Auftragnehmers
Name: SUSS MicroTec Lithography GmbH
Postort: Garching
Land: Deutschland 🇩🇪
Region: München, Landkreis🏙️
Der Auftragnehmer ist ein KMU ✅ Angaben zum Wert des Auftrags/der Partie (ohne MwSt.)
Gesamtwert des Auftrags/Loses: EUR 0.01 💰
“Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de
With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a...”
Genaue Informationen über Fristen für Überprüfungsverfahren
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§ 160 Par. 3 Clause 1 No 4 GWB ). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it(§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No 1 GWB).
Mehr anzeigen
Quelle: OJS 2020/S 204-495988 (2020-10-15)