Spectroscopic imaging ellipsometer (ES) with atomic force microscope (AFM)

Helmholtz-Zentrum Dresden-Rossendorf e.V.

Delivery, installation and on-site acceptance test of a spectroscopic imaging ellipsometer (ES) integrated with atomic force microscope (AFM)Award of contract for the delivery, installation and on-site acceptance test of a spectroscopic imaging ellipsometer (ES) integrated with atomic force microscope (AFM)

Deadline

Die Frist für den Eingang der Angebote war 2026-02-12. Die Ausschreibung wurde veröffentlicht am 2026-01-12.

Wer?

• Helmholtz-Zentrum Dresden-Rossendorf e.V.

Wie?

• Apparate und Geräte zum Prüfen und Testen › Maschinen und Geräte zum Prüfen und Messen

Wo?

• Dresden › Dresden, Kreisfreie Stadt
• Köln › Bonn, Kreisfreie Stadt

Geschichte der Beschaffung

Datum	Dokument
2026-01-12	Auftragsbekanntmachung

Auftragsbekanntmachung (2026-01-12)
Objekt
Umfang der Beschaffung
Titel: Spectroscopic imaging ellipsometer (ES) with atomic force microscope (AFM)
Referenznummer: EUOV2514
Kurze Beschreibung:

Art des Vertrags: Lieferungen
Produkte/Dienstleistungen: Maschinen und Geräte zum Prüfen und Messen 📦
Sonstige Beschränkungen am Erfüllungsort: Ort im betreffenden Land
Beschreibung
Interne Kennung: LOT-0000
Beschreibung der Beschaffung:

At the Institute of Ion Beam Physics and Materials Research within the department Magnetism at the Helmholtz-Zentrum Dresden-Rossendorf a spectroscopic imaging ellipsometer (ES) integrated with atomic force microscope (AFM) is to be procured. The integration of the ES with AFM is crucial for the further experiments. The system must provide a unique possibility to investigate the optical, magnetic and structural properties of different nanostructured materials including classical semiconductors and 2D materials. In addition, the surface morphology can be determined. The integration of ES with AFM allows easy access to the same investigated field and is especially important for nanowires, 2D materials and other nano-objects. The ES should be equipped with imaging variable angle spectroscopy system with imaging detection system in the spectral range between 190 and 1700 nm. The instrument must give the values as well as microscopic maps and histograms of Delta and Psi with a lateral resolution better than 2 µm. Moreover, the instrument must be able to show ellipsometric contrast live view of the sample with better than 2µm lateral resolution and to measure the ellipsometry angles Delta and Psi at each pixel of the imaged surface area. The instrument must offer the possibility to use in future different light sources, in order to cover the spectral range up to 2700 nm. Moreover, the device must have automatic sample alignment, high precision software controlled goniometer to enable variable angle-of-incident measurements between 40 and 90 deg, angle resolution of 0.001 deg and accuracy of 0.01. The goniometer-head shall be able to align to the surface of a sample in two directions to enable the use on liquids. Since one of the applications includes transparent substrates, the instrument should allow the knife edge illumination that eliminates back side reflections from the substrate. Those back side reflections would lead to wrong results. This is true for Si-substrates as well, when measured at wavelengths above 900 nm, where Si becomes transparent. Also transparent sample of glass-type materials benefit from this. The knife-edge aperture must be adjustable to accommodate different substrate thickness' as well as different refractive index materials. The scope of deliveries and services to be offered includes (i. e. included in the offer price): - delivery at the place of usage according to our contractual and tendering terms and conditions, section 5 "Delivery and acceptance" Place of usage: Room 103 / Building 207 - user documentation in English and German - the footprint, technical drawings, electrical drawings must be supplied in the documentation - minimum 12 month warranty - on-site installation and user training (OST) The fulfilment of the specifications required under 2. Performance quote of annex 01A must be clearly stated in and be part the offer.

Beschreibung der Beschaffung

At the Institute of Ion Beam Physics and Materials Research within the department Magnetism at the Helmholtz-Zentrum Dresden-Rossendorf a spectroscopic imaging ellipsometer (ES) integrated with atomic force microscope (AFM) is to be procured. The integration of the ES with AFM is crucial for the further experiments. The system must provide a unique possibility to investigate the optical, magnetic and structural properties of different nanostructured materials including classical semiconductors and 2D materials. In addition, the surface morphology can be determined. The integration of ES with AFM allows easy access to the same investigated field and is especially important for nanowires, 2D materials and other nano-objects.

The ES should be equipped with imaging variable angle spectroscopy system with imaging detection system in the spectral range between 190 and 1700 nm. The instrument must give the values as well as microscopic maps and histograms of Delta and Psi with a lateral resolution better than 2 µm. Moreover, the instrument must be able to show ellipsometric contrast live view of the sample with better than 2µm lateral resolution and to measure the ellipsometry angles Delta and Psi at each pixel of the imaged surface area. The instrument must offer the possibility to use in future different light sources, in order to cover the spectral range up to 2700 nm. Moreover, the device must have automatic sample alignment, high precision software controlled goniometer to enable variable angle-of-incident measurements between 40 and 90 deg, angle resolution of 0.001 deg and accuracy of 0.01. The goniometer-head shall be able to align to the surface of a sample in two directions to enable the use on liquids. Since one of the applications includes transparent substrates, the instrument should allow the knife edge illumination that eliminates back side reflections from the substrate. Those back side reflections would lead to wrong results. This is true for Si-substrates as well, when measured at wavelengths above 900 nm, where Si becomes transparent. Also transparent sample of glass-type materials benefit from this. The knife-edge aperture must be adjustable to accommodate different substrate thickness' as well as different refractive index materials.

The scope of deliveries and services to be offered includes (i. e. included in the offer price):
- delivery at the place of usage according to our contractual and tendering terms and conditions, section 5 "Delivery and acceptance"
Place of usage: Room 103 / Building 207
- user documentation in English and German
- the footprint, technical drawings, electrical drawings must be supplied in the documentation
- minimum 12 month warranty
- on-site installation and user training (OST)

The fulfilment of the specifications required under 2. Performance quote of annex 01A must be clearly stated in and be part the offer.

Zusätzliche Informationen:

Co-financed by the European Union. This measure is co-financed by tax revenue on the basis of the budget approved by the Saxon State Parliament.

Zusätzliche Produkte/Dienstleistungen: Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser) 📦
Dauer: 120 Tage
Vergabekriterien
Preis ✅
Preis (Gewichtung): 100.00
Titel
Los-Identifikationsnummer: LOT-0000
Beschreibung
Land: Deutschland 🇩🇪

Verfahren
Art des Verfahrens
Offenes Verfahren ✅
Rechtsgrundlage: Richtlinie 2014/24/EU
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2026-02-12 12:00:00 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Englisch 🗣️
Mindestzeitraum, in dem der Bieter das Angebot aufrechterhalten muss: 36 Tage
Bedingungen für die Einreichung eines Angebots
Die Bieter können mehrere Angebote einreichen
Elektronische Rechnungsstellung: Zulässig
Zusätzliche Informationen: In accordance with legal requirements from Procurement Ordinance (VgV).
Vergabekriterien
Gewichtungsart: Gewichtung (Prozentanteil, genau)

Rechtliche, wirtschaftliche, finanzielle und technische Informationen
Bedingungen für die Teilnahme
Eignungskriterium: Andere wirtschaftliche oder finanzielle Anforderungen
Liste und kurze Beschreibung der Regeln und Kriterien:

Declaration about the identification of the beneficial owners (see annex '01D_Declaration_Indentification of beneficial owners_EUOV2507')

Eignungskriterium: Eintragung in ein relevantes Berufsregister
Liste und kurze Beschreibung der Regeln und Kriterien:

Declaration about the registration within a professional or trade register as prescribed by the legal provisions of the state where the bidder is based (see annex '01B_Self Declaration_Non-existence Reasons for Exclusion_EUOV2507')

Eignungskriterium: Eintragung in das Handelsregister
Ausschlussgrund: Verstoß gegen die in den rein innerstaatlichen Ausschlussgründen verankerten Verpflichtungen
Beschreibung der Ausschlussgründe:

The statutory exclusion requirements pursuant to Sections 123 to 126 of the German Act against Restraint of Trade (GWB) and the 5th EU Sanctions Package (RUS sanctions) as well as the notification of funding of the project magKI apply. To this end, the self-declarations 'No grounds for exclusion’, 'RUS sanctions’ and the declaration 'identification of beneficial owners' attached to the tender documents must be completed and submitted as part of the tender.

Öffentlicher Auftraggeber
Name und Adressen
Name: Helmholtz-Zentrum Dresden-Rossendorf e.V.
Nationale Registrierungsnummer: 992-80200-35
Postanschrift: Bautzner Landstraße 400
Postleitzahl: 01328
Postort: Dresden
Region: Dresden, Kreisfreie Stadt 🏙️
Land: Deutschland 🇩🇪
Kontaktperson: Abteilung Vergabe- und Beschaffungswesen
E-Mail: dm-vergabe@hzdr.de 📧
Telefon: +49 351260-0 📞
URL: https://www.hzdr.de 🌏
Art des öffentlichen Auftraggebers
Einrichtung des öffentlichen Rechts
Haupttätigkeit
Bildung
Kommunikation
Dokumente URL: https://www.tender24.de/NetServer/TenderingProcedureDetails?function=_Details&TenderOID=54321-Tender-19b9db35fa5-2ff797f475281f21 🌏
Teilnahme-URL: https://www.tender24.de 🌏
Elektronische Einreichung: Zulässig

Ergänzende Informationen
Körper überprüfen
Name: Vergabekammer des Bundes
Postanschrift: Kaiser-Friedrich-Straße 16
Postleitzahl: 53113
Postort: Bonn
Region: Bonn, Kreisfreie Stadt 🏙️
Land: Deutschland 🇩🇪
E-Mail: vk@bundeskartellamt.bund.de 📧
Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Wie: Körper überprüfen
Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:

Legal remedies pursuant to Section 160 GWB: 1) The public procurement chamber shall only initiate a review procedure upon application; 2) Any company that has an interest in the public contract or concession is authorized to apply and asserts an infringement of its rights pursuant to Section 97 (6) GWB due to non-compliance with procurement regulations. It must be shown that the company has suffered or is at risk of suffering damage as a result of the alleged breach of the procurement regulations; 3) The application is inadmissible if: (1) The applicant has recognized the alleged breach of procurement regulations before submitting the application for review and has not notified the contracting authority of this within a period of 10 calendar days; the expiry of the deadline pursuant to Section 134 (2) GWB remains unaffected, (2) violations of procurement regulations that are recognizable on the basis of the contract notice are not notified to the contracting authority by the expiry of the deadline for application or submission of tenders specified in the contract notice at the latest, (3) violations of procurement regulations that are only recognizable in the procurement documents are not notified to the contracting authority by the expiry of the deadline for application or submission of tenders at the latest, (4) more than 15 calendar days have passed since receipt of the notification from the contracting authority that it does not intend to remedy a complaint. Sentence 1 shall not apply to an application for a declaration of invalidity of the contract pursuant to Section 135 (1) No. 2.

Informationen über elektronische Arbeitsabläufe
Die elektronische Rechnungsstellung wird akzeptiert
Bekanntmachungsangaben
Bevorzugtes Datum der Veröffentlichung: 2026-01-12+01:00 📅
Quelle: OJS 2026/S 009-026077 (2026-01-12)

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