Objekt Umfang der Beschaffung
Titel: DRIE_CVD Plasmacluster - PR340021-2590-W
PR340021-2590-W
Produkte/Dienstleistungen: Module📦
Kurze Beschreibung: DRIE_CVD Plasmacluster
1️⃣
Ort der Leistung: Berlin🏙️
Hauptstandort oder Erfüllungsort: IZM
Gustav-Meyer-Allee 25
13355 Berlin
Beschreibung der Beschaffung:
“1 pc of DRIE_CVD Plasmacluster with options:
15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The...”
Beschreibung der Beschaffung
1 pc of DRIE_CVD Plasmacluster with options:
15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The software should have 2 different security levels (password protected) for operation, engineering
27. automated backup for the operating system, tool settings, recipes and data
28. The tools should be supplied with SECS/GEM Interface
29. Remote control option for fast service support
42. The DRIE Module has to be equipped with an Optical Emission Spectroscopy system
43. End Point detection for the switching gas process on SiO2 etch stop layer should be able to work with masks (photoresist), where the opening area can be big (~5%) but also as small as 0,5% of the total wafer area
44. An end point detection in the DRIE module shall be implemented to detect the reveal of Cu filled TSVs, when thinning from the backside is carried out.
45. The DRIE module should be able to detect the wafer thickness during thr process and stop as a defined thickness is reached
46.The RIE module should be equipped with and optical end point detecton system
47. The PECVD Module should be equipped with end point detection system for the chamber clean
95. a warranty of 24 month
Mehr anzeigen Vergabekriterien
Der Preis ist nicht das einzige Zuschlagskriterium, und alle Kriterien werden nur in den Auftragsunterlagen genannt
Laufzeit des Vertrags, der Rahmenvereinbarung oder des dynamischen Beschaffungssystems
Der nachstehende Zeitrahmen ist in Monaten ausgedrückt.
Beschreibung
Dauer: 8
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen:
“15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The software should have 2 different security...”
Beschreibung der Optionen
15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The software should have 2 different security levels (password protected) for operation, engineering
27. automated backup for the operating system, tool settings, recipes and data
28. The tools should be supplied with SECS/GEM Interface
29. Remote control option for fast service support
42. The DRIE Module has to be equipped with an Optical Emission Spectroscopy system
43. End Point detection for the switching gas process on SiO2 etch stop layer should be able to work with masks (photoresist), where the opening area can be big (~5%) but also as small as 0,5% of the total wafer area
44. An end point detection in the DRIE module shall be implemented to detect the reveal of Cu filled TSVs, when thinning from the backside is carried out.
45. The DRIE module should be able to detect the wafer thickness during thr process and stop as a defined thickness is reached
46.The RIE module should be equipped with and optical end point detecton system
47. The PECVD Module should be equipped with end point detection system for the chamber clean
95. a warranty of 24 month
Rechtliche, wirtschaftliche, finanzielle und technische Informationen Bedingungen für die Teilnahme
Liste und kurze Beschreibung der Bedingungen:
“Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab” Wirtschaftliche und finanzielle Leistungsfähigkeit
Liste und kurze Beschreibung der Auswahlkriterien:
“Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab” Technische und berufliche Fähigkeiten
Liste und kurze Beschreibung der Auswahlkriterien:
“Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab” Bedingungen für den Vertrag
Bedingungen für die Vertragserfüllung:
“In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents...”
Bedingungen für die Vertragserfüllung
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Verfahren Art des Verfahrens
Wettbewerbliches Verfahren mit Verhandlung
Administrative Informationen
Frist für den Eingang von Angeboten oder Teilnahmeanträgen: 2023-10-20
10:00 📅
Voraussichtliches Datum der Versendung der Aufforderungen zur Angebotsabgabe oder zur Teilnahme an die ausgewählten Bewerber: 2023-10-30 📅
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Englisch 🗣️
Das Angebot muss gültig sein bis: 2024-01-26 📅
Ergänzende Informationen Informationen über elektronische Arbeitsabläufe
Die elektronische Bestellung wird verwendet
Die elektronische Rechnungsstellung wird akzeptiert
Körper überprüfen
Name: Vergabekammer
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“Applications for review are not permitted if more than 15 calendar days have passed since receipt of notification from the contracting authority that it is...”
Genaue Informationen über Fristen für Überprüfungsverfahren
Applications for review are not permitted if more than 15 calendar days have passed since receipt of notification from the contracting authority that it is unwilling to redress an objection (section 160 (3) sentence 1 no. 4 of the German Competition Act (Gesetz gegen Wettbewerbsbeschränkungen, GWB)). Additionally, applications for review are not permitted if an award has been made before the public procurement tribunal has informed the contracting authority about the application for review (sections 168 (2) sentence 1 and 169 (1) GWB). Contracts may be awarded 15 calendar days after the tenderer information pursuant to section 134 (1) GWB has been sent. If the information is sent electronically or by fax, the period shall be reduced to ten calendar days (section 134 (2) GWB). The period shall begin on the day after which the contracting authority sends the information; the date of receipt by the tenderer and candidate in question shall be irrelevant. The admissibility of a review application also requires that the applicant notified the contracting authority about the claimed violations of public procurement provisions within ten calendar days of becoming aware of them (section 160 (3) sentence 1 no. 1 GWB). Violations of public procurement provisions which become apparent from the tender notice must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender specified in the notice (section 160 (3) sentence 1 no. 2 GWB). Violations of public procurement provisions which only become apparent from the procurement documents must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender (section 160 (3) sentence 1 no. 3 GWB).
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: https://www.fraunhofer.de🌏
Quelle: OJS 2023/S 184-575388 (2023-09-20)