2018-03-05Scanning Acoustic Microscope (Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe)
Fraunhofer IMS requires a new or refurbished scanning acoustic microscope. The tool must fulfill the following functions: fully automated wafer handling from at least one cassette, void inspection of bonded wafers (double band, triple bond, double band with thinned top wafer), SUD bump connection quality, TSV inspection and automatic drying function. Detailed specifications for these functions are given in section 2.1. Results from the measurements must be saved as ASCII data automatically. Software for …
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