Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below. Optional: The system can be easily changed to process wafer size 6”.
The wafers are loaded automatically by a robot handler from cassette to cassette.
The system consists at least of 4 electroplating modules for 4 different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system.
Optional: a waste disposal system for heavy metal waste for the UBM removal module.
The system includes software which offers the option of an operating mode and a manual mode for engineering.
The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte
Next II.2.4):
Deadline
Die Frist für den Eingang der Angebote war 2018-04-30.
Die Ausschreibung wurde veröffentlicht am 2018-03-29.
Anbieter
Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:
Bekanntmachung über vergebene Aufträge (2018-11-21) Öffentlicher Auftraggeber Name und Adressen
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastr. 27 c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: fraunhofer@deutsche-evergabe.de📧
Region: München, Kreisfreie Stadt🏙️
URL: http://www.fraunhofer.de🌏
Adresse des Käuferprofils: http://www.deutsche-evergabe.de/🌏 Art des öffentlichen Auftraggebers
Andere Art: Forschungsgesellschaft e. V.
Objekt Umfang der Beschaffung
Titel: 1 pc. Fully Automated Electroplating System
E_038_234371 deyda-bla FMD
Produkte/Dienstleistungen: Maschinen für die Galvanotechnik📦
Kurze Beschreibung:
“Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the...”
Kurze Beschreibung
Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below.
Optional: the system can be easily changed to process wafer size 6”.
The wafers are loaded automatically by a robot handler from cassette to cassette.
The system consists at least of 4 electroplating modules for four different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system.
Optional: a waste disposal system for heavy metal waste for the UBM removal module.
The system includes software which offers the option of an operating mode and a manual mode for engineering.
The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte.
Next II.2.4):
Mehr anzeigen
Gesamtwert der Beschaffung (ohne MwSt.): EUR 0.01 💰
1️⃣
Ort der Leistung: Duisburg, Kreisfreie Stadt🏙️
Hauptstandort oder Erfüllungsort: 47057 Duisburg.
Beschreibung der Beschaffung:
“See II.1.4):
The system has to be installed by the manufacturer “through the wall” in the cleanroom at Fraunhofer IMS site and must be conform to CMOS...”
Beschreibung der Beschaffung
See II.1.4):
The system has to be installed by the manufacturer “through the wall” in the cleanroom at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (class 10). Fraunhofer IMS prepares the cleanroom for the system installation.
For proven reliability the system must be installed in more than 10 units worldwide and the year of construction (if refurbished) has to be 2010 or later.
The system has to allow a completely safe process run without any risk for the health of the operator.
Because of limited cleanroom space the mainframe should have a footprint smaller than [3000 x 3300] mm.
Electronic racks, the waste disposal system and a separate user console are not included in this limitation.
Mehr anzeigen Vergabekriterien
Qualitätskriterium (Bezeichnung): Technical configuration and specification
Qualitätskriterium (Gewichtung): 45
Qualitätskriterium (Bezeichnung): Service and support
Qualitätskriterium (Gewichtung): 20
Preis (Gewichtung): 35
Informationen über Optionen
Optionen ✅
Beschreibung der Optionen:
“Must-options (have to be offered):
— Option 1: 24 months in accordance with VOL (Contracting Procedure for the Award of Service Performance Contracts by the...”
Beschreibung der Optionen
Must-options (have to be offered):
— Option 1: 24 months in accordance with VOL (Contracting Procedure for the Award of Service Performance Contracts by the Public Sector — Vergabe- und Vertragsordnung für Leistungen), Part B, Sect. 14. The statutory warranty period starts after the date of acceptance,
— Option 2: TSV Copper Module,
— Option 3: Vacuum Prewet Chamber,
— Option 4: Waste Disposal System for UBM waste could-Optionen (please offer, if available),
— Option 5: handling of 2250 μm wafer,
— Option 6: UBM Etch optical End Point Detection,
— Option 7: adjustable edge exclusion,
— Option 8: Secs/Gem interface,
— Option 9: a network compatibility for data export, recipe sharing, offline programming,
— Option 10: UPS for computer,
— Option 11: maintenance contract.
Verfahren Art des Verfahrens
Wettbewerbliches Verfahren mit Verhandlung
Administrative Informationen
Frühere Veröffentlichungen zu diesem Verfahren: 2018/S 064-142060
Auftragsvergabe
1️⃣
Titel: 1 pc. Fully Automated Electroplating System
Datum des Vertragsabschlusses: 2018-11-19 📅
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 2
Name und Anschrift des Auftragnehmers
Name: ClassOne Technology GmbH
Postanschrift: Prielmayerstr. 3
Postort: München
Postleitzahl: 80335
Land: Dänemark 🇩🇰
Region: München, Landkreis🏙️
Der Auftragnehmer ist ein KMU ✅ Angaben zum Wert des Auftrags/der Partie (ohne MwSt.)
Gesamtwert des Auftrags/Loses: EUR 0.01 💰
“Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at...”
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de
With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
Please note that registration is required for requests to participate, tender submissions and tenderer questions.
We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.
Mehr anzeigen Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪 Für Mediationsverfahren zuständige Stelle
Name: Vergabeprüfstelle des BMBF Referat Z 23
Postanschrift: Heinemannstraße 2
Postort: Bonn
Postleitzahl: 53175
Land: Deutschland 🇩🇪 Verfahren zur Überprüfung
Genaue Informationen über Fristen für Überprüfungsverfahren:
“As long as a contract has not yet been effectively awarded (conclusion of contract), an application fora review can be made as an appeal with the body named...”
Genaue Informationen über Fristen für Überprüfungsverfahren
As long as a contract has not yet been effectively awarded (conclusion of contract), an application fora review can be made as an appeal with the body named under VI 4.1. Contenders/tenderers must promptly file complaints regarding violations of the provisions governing the award of public contracts with the awarding body named under I.1) before they apply for a review.We expressly point out the application deadline of §160 German Act Against Restraints of Competition [Gesetz gegen Wettbewerbsbeschränkungen — GWB]. Tenderers whose offers are not successful shall be informed before the award of the contract pursuant to §134 GWB.
Mehr anzeigen Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name:
“Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe”
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
Land: Deutschland 🇩🇪
E-Mail: einkauf@zv.fraunhofer.de📧
URL: http://www.fraunhofer.de🌏
Quelle: OJS 2018/S 226-516774 (2018-11-21)