1 pc. fully automated electroplating system

Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe

Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below. Optional: The system can be easily changed to process wafer size 6”.
The wafers are loaded automatically by a robot handler from cassette to cassette.
The system consists at least of 4 electroplating modules for 4 different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system.
Optional: a waste disposal system for heavy metal waste for the UBM removal module.
The system includes software which offers the option of an operating mode and a manual mode for engineering.
The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte
Next II.2.4):

Deadline

Die Frist für den Eingang der Angebote war 2018-04-30. Die Ausschreibung wurde veröffentlicht am 2018-03-29.

Anbieter

Die folgenden Lieferanten werden in Vergabeentscheidungen oder anderen Beschaffungsunterlagen erwähnt:

• ClassOne Technology GmbH

Wer?

• Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe

Wie?

• Signalgeneratoren, Antennensignalverteiler und Maschinen für die Galvanotechnik › Maschinen für die Galvanotechnik

Wo?

• Düsseldorf › Duisburg, Kreisfreie Stadt
• Oberbayern › München, Kreisfreie Stadt

Geschichte der Beschaffung

Datum	Dokument
2018-03-29	Auftragsbekanntmachung
2018-11-21	Bekanntmachung über vergebene Aufträge

Auftragsbekanntmachung (2018-03-29)
Objekt
Umfang der Beschaffung
Titel: Maschinen für die Galvanotechnik
Referenznummer: E_038_234371 deyda-bla FMD
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below. Optional: The system can be easily changed to process wafer size 6”. The wafers are loaded automatically by a robot handler from cassette to cassette. The system consists at least of 4 electroplating modules for 4 different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system. Optional: a waste disposal system for heavy metal waste for the UBM removal module. The system includes software which offers the option of an operating mode and a manual mode for engineering. The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte Next II.2.4):

Metadaten der Bekanntmachung
Originalsprache: Englisch 🗣️
Dokumenttyp: Auftragsbekanntmachung
Art des Auftrags: Lieferungen
Verordnung: Europäische Union, mit GPA-Beteiligung
Gemeinsames Vokabular für öffentliche Aufträge (CPV)
Code: Maschinen für die Galvanotechnik 📦
Ort der Leistung
NUTS-Region: Duisburg, Kreisfreie Stadt 🏙️

Verfahren
Verfahrensart: Verhandlungsverfahren
Angebotsart: Angebot für alle Lose
Vergabekriterien
Wirtschaftlichstes Angebot

Öffentlicher Auftraggeber
Identität
Land: Deutschland 🇩🇪
Art des öffentlichen Auftraggebers: Sonstiges
Name des öffentlichen Auftraggebers: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastr. 27 c
Postleitzahl: 80686
Postort: München
Kontakt
Internetadresse: http://www.fraunhofer.de 🌏
E-Mail: fraunhofer@deutsche-evergabe.de 📧
URL der Dokumente: http://www.deutsche-evergabe.de/ 🌏
URL der Teilnahme: http://www.deutsche-evergabe.de/ 🌏

Referenz
Daten
Absendedatum: 2018-03-29 📅
Einreichungsfrist: 2018-04-30 📅
Veröffentlichungsdatum: 2018-03-31 📅
Kennungen
Bekanntmachungsnummer: 2018/S 064-142060
ABl. S-Ausgabe: 64
Zusätzliche Informationen

Request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract noticeandtheawarddocuments are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therfore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Objekt
Umfang der Beschaffung
Kurze Beschreibung:

The wafers are loaded automatically by a robot handler from cassette to cassette.

The system consists at least of 4 electroplating modules for 4 different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system.

Optional: a waste disposal system for heavy metal waste for the UBM removal module.

The system includes software which offers the option of an operating mode and a manual mode for engineering.

The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte

Next II.2.4):

See II.1.4):

The system has to be installed by the manufacturer “through the wall” in the cleanroom at Fraunhofer IMS site and must be conform to CMOS compatible cleanroom conditions (class 10). Fraunhofer IMS prepares the cleanroom for the system installation.

For proven reliability the system must be installed in more than 10 units worldwide and the year of construction (if refurbished) has to be 2010 or later.

The system has to allow a completely safe process run without any risk for the health of the operator.

Because of limited cleanroom space the mainframe should have a footprint smaller than [3000 x 3300] mm.

Electronic racks, the waste disposal system and a separate user console are not included in this limitation.

Dauer: 12 Monate
Beschreibung der Optionen:

Must-Options (have to be offered).

— Option 1: 24 months in accordance with VOL (Contracting Procedure for the Award of Service Performance Contracts by the Public Sector — Vergabe- und Vertragsordnung für Leistungen), Part B, Sect. 14. The statutory warranty period starts after the date of acceptance,

— Option 2: TSV Copper Module,

— Option 3: Vacuum Prewet Chamber,

— Option 4: Waste Disposal System for UBM waste Could-Optionen (please offer, if availible).

— Option 5: Handling of 2250 μm wafer,

— Option 6: UBM Etch optical End Point Detection,

— Option 7: Adjustable edge exclusion,

— Option 8: Secs/Gem interface,

— Option 9: A network compatibility for data export, recipe sharing, offline programming,

— Option 10: UPS for computer,

— Option 11: Maintenance contract.

Ort der Leistung
Hauptstandort oder Erfüllungsort: 47057 Duisburg

Rechtliche, wirtschaftliche, finanzielle und technische Informationen
Bedingungen für die Teilnahme
Befähigung zur Berufsausübung:

The documents listed in the following must be presented in full with the tender. Incomplete documents coul lead to exclusion from the procedure.

Wirtschaftliche und finanzielle Leistungsfähigkeit:

(1) Designation of the company revenue for the last three business years

(2) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB)

(3) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client)

Technische und berufliche Fähigkeiten:

(1) Company profile and the actual amount of employees.

(2) References from comparable projects not more than 3 years old (minimum information: Name of the clients and contacts including contact data). If, for reasons of data protection, you are not allowed to name your contact persons, please categorize your client (research, industry, other public clients).

Auftragsausführung
Bedingungen für die Vertragserfüllung:

In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.

Verfahren
Mindestzahl der Bewerber: 3
Höchstzahl der Bewerber: 5
Zeitpunkt des Eingangs der Angebote: 23:59
Sprachen, in denen Angebote oder Teilnahmeanträge eingereicht werden können: Deutsch 🗣️

Öffentlicher Auftraggeber
Identität
Andere Art des öffentlichen Auftraggebers: Forschungsgesellschaft e. V.
Kontakt
Adresse des Käuferprofils: http://www.deutsche-evergabe.de/ 🌏
Dokumente URL: http://www.deutsche-evergabe.de/ 🌏

Referenz
Zusätzliche Informationen

Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract noticeandtheawarddocuments are available to you at the German eVergabe with or without registration.

Please note that registration is required for requests to participate, tender submissions and tenderer questions.

We therfore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Ergänzende Informationen
Körper überprüfen
Name: Vergabekammer des Bundes beim Bundeskartellamt
Postanschrift: Villemombler Straße 76
Postort: Bonn
Postleitzahl: 53123
Land: Deutschland 🇩🇪
Informationen zu Fristen für Nachprüfungsverfahren:

Precise information on deadline(s) for review…

… procedures:

… procedures: Precise information on the deadlines for filing appeals: As long as a contract has not yet been effectively awarded (conclusion of contract), an application fora review can be made as an appeal with the body named under VI 4.1. Contenders/tenderers must promptly file complaints regarding violations of the provisions governing the award of public contracts with the awarding body named under I.1) before they apply for a review. We expressly point out the application deadline of §160 German Act Against Restraints of Competition [Gesetz gegen Wettbewerbsbeschränkungen — GWB]. Tenderers whose offers are not successful shall be informed before the award of the contract pursuant to §134 GWB.

Für Mediationsverfahren zuständige Stelle
Name: Vergabeprüfstelle des BMBF Referat Z 23
Postanschrift: Heinemannstraße 2
Postleitzahl: 53175
Dienststelle, bei der Informationen über das Überprüfungsverfahren eingeholt werden können
Name: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
Postanschrift: Hansastraße 27c
Postort: München
Postleitzahl: 80686
E-Mail: einkauf@zv.fraunhofer.de 📧
Internetadresse: http://www.fraunhofer.de 🌏
Quelle: OJS 2018/S 064-142060 (2018-03-29)

Bekanntmachung über vergebene Aufträge (2018-11-21)
Objekt
Umfang der Beschaffung
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below. Optional: the system can be easily changed to process wafer size 6”. The wafers are loaded automatically by a robot handler from cassette to cassette. The system consists at least of 4 electroplating modules for four different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system. Optional: a waste disposal system for heavy metal waste for the UBM removal module. The system includes software which offers the option of an operating mode and a manual mode for engineering. The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte. Next II.2.4):

Gesamtwert des Auftrags: 0.01 EUR 💰
Metadaten der Bekanntmachung
Dokumenttyp: Bekanntmachung über vergebene Aufträge

Verfahren
Angebotsart: Entfällt

Referenz
Daten
Absendedatum: 2018-11-21 📅
Veröffentlichungsdatum: 2018-11-23 📅
Kennungen
Bekanntmachungsnummer: 2018/S 226-516774
Verweist auf Bekanntmachung: 2018/S 064-142060
ABl. S-Ausgabe: 226
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration. Please note that registration is required for requests to participate, tender submissions and tenderer questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Objekt
Umfang der Beschaffung
Kurze Beschreibung:

Fraunhofer IMS requires a new or refurbished fully automated electroplating system. In this system 8” (200 mm) wafers can be processed according to the specifications below.

Optional: the system can be easily changed to process wafer size 6”.

The system consists at least of 4 electroplating modules for four different electrolytes Cu, Ni, Au and Sn, a Prewet/Spin Rinse module, a module for UBM (under bump metallization) removal and one module for the promotion of Ni-Au adhesion. Modules for TSV copper process (i.e. additional vacuum prewet module) must be available optional for this system.

The system includes an interface for a fully automated plating bath analyse equipment for every electrolyte.

Beschreibung der Optionen:

Must-options (have to be offered):

— Option 4: Waste Disposal System for UBM waste could-Optionen (please offer, if available),

— Option 5: handling of 2250 μm wafer,

— Option 7: adjustable edge exclusion,

— Option 9: a network compatibility for data export, recipe sharing, offline programming,

— Option 11: maintenance contract.

Ort der Leistung
Hauptstandort oder Erfüllungsort: 47057 Duisburg.

Verfahren
Vergabekriterien
Qualitätskriterium (Bezeichnung): Technical configuration and specification
Qualitätskriterium (Gewichtung): 45
Qualitätskriterium (Bezeichnung): Service and support
Qualitätskriterium (Gewichtung): 20
Preis (Gewichtung): 35

Auftragsvergabe
Datum des Vertragsabschlusses: 2018-11-19 📅
Name: ClassOne Technology GmbH
Postanschrift: Prielmayerstr. 3
Postort: München
Postleitzahl: 80335
Land: Dänemark 🇩🇰
München, Landkreis 🏙️
Gesamtwert des Auftrags: 0.01 EUR 💰
Informationen über Ausschreibungen
Anzahl der eingegangenen Angebote: 2

Referenz
Zusätzliche Informationen

Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de

With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.

Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.

We therefore recommend early registration, also in order to receive any tenderer information; you otherwise bear the risk of possible tender exclusion.

Ergänzende Informationen
Körper überprüfen
Informationen zu Fristen für Nachprüfungsverfahren:

As long as a contract has not yet been effectively awarded (conclusion of contract), an application fora review can be made as an appeal with the body named under VI 4.1. Contenders/tenderers must promptly file complaints regarding violations of the provisions governing the award of public contracts with the awarding body named under I.1) before they apply for a review.We expressly point out the application deadline of §160 German Act Against Restraints of Competition [Gesetz gegen Wettbewerbsbeschränkungen — GWB]. Tenderers whose offers are not successful shall be informed before the award of the contract pursuant to §134 GWB.

Quelle: OJS 2018/S 226-516774 (2018-11-21)

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