Ellipsometer

Fraunhofer-Gesellschaft

Auftragsgegenstand, CPA-Nummer: CPV: 31712000. Bedarfsmeldung-Nr.: 838/203152/100. Ellipsometer. Fully automated, production proven ellipsometer for semiconductor applications. Two or more single wavelength, long lifetime lightsources. Thermal Oxide / Silicon thickness 0 - 1 000 nm; CDV Oxide / Silicon thickness & nf 50-3 000 nm; CDV Oxide / TiN / Aluminum thickness & nf 50-3 000 nm; PE / LPCVD Nitride / Silicon thickness & nf 0-1 000 nm. Poly Silicon / Therm. Oxide / Silicon thickness & nf 30 - 1 500 nm; PE / LPCVD Nitride / Therm. Oxide / Silicon thickness & nf, 50 - 500 nm; PE/LPCVD Nitride / CVD Oxide / Silicon thickness & nf's, 50 - 750 / 50 - 1 000 nm; PE / LPCVD Nitride / CVD Oxide / TIN/Alu thickness & nf's, 50-750/50-1 000 nm. results within NIST uncertainty range of standard. Precision / Short term repeatability: Thickness: 1 Sigma < 0,2 Ångström, Refractive Index: 1 Sigma < 0,004, (100 measurements same site, 100 nm thermal oxide). Stability / Long term reproducibility: Thickness: 1 Sigma < 0,4 Ångström, Refractive Index: 1 Sigma < 0,006 (140 measurements same site with wafer loading / unloading, 100 nm thermal oxide: 10 times per measurement, 2 measurements per day over 7 days). 6 and 8 inch wafer without hardware conversion. Automatic waferhandler with flat / notch finder and random access cassette. Pattern recognition system for waferalignment. < 5 > 0,3 ìm per pass. > 50 wafers/hour, 5 points on monitor wafers, > 30 wafers/hour, 5 points with pattern recognition. Measurement spot < 30 ìm in its largest dimension. Cleanroom Class 1 compatible. Automatic and manual chuckpositioning. One year warranty on parts and labor. SPC / Trendcharts capability. Network connection. Windows NT operating system.

Die Frist für den Eingang der Angebote war 2001-05-05. Die Ausschreibung wurde veröffentlicht am 2001-04-26.

• • Fraunhofer-Gesellschaft

• • Elektronische Ausstattung › Mikroelektronische Maschinen und Geräte und Mikrosysteme

• • Oberbayern › München, Kreisfreie Stadt